Rau ntug-emitting laser (EEL) raug, nanometers tseem ceeb-raws li ua feeb. Ob peb kauj ruam yog raws li lub sij hawm- tseem ceeb raws li lub caij nyoog ntawm cleaving lub laser bar thiab siv dielectric iav txheej. Cov ntsej muag tshiab oxidize thiab sib sau cov teeb meem uas tuaj yeem cuam tshuam cov txheej txheem zoo thiab kev ntseeg siab ntawm cov cuab yeej.
Txhawm rau tswj nws, cov neeg tsim khoom vam khom cov cuab yeej siv nyiaj ntau, kev tuav tsis zoo, thiab cov txheej txheem nruj ua ke. Zinc selenide (ZnSe) epitaxial overgrowth muaj kev ruaj ntseg ntev dua tab sis yuav tsum muaj cov kab hluav taws xob molecular epitaxy (MBE) ib puag ncig, uas txwv kev nkag mus thiab nce nqi peev.
Yuav ua li cas yog facet stability tuaj yeem txuas ntxiv tsis yog rau feeb tab sis rau lub lis piam lossis hli -tsis muaj MBE lossishauv qhovtxheej?
Kev nce qib tsis ntev los no hauv crystalline -oxide facet passivation hais txog qhov no. Cov txheej txheem reconstructs lub facet rau hauv ib qho ultrathin, thermodynamically ruaj khov crystalline oxide uas tiv thaiv ntxiv oxidation. Qhov tshwm sim yog qhov tseeb txheej txheem decoupling, muab cov saw yooj yooj yim, txo nqi peev (capex), thiab txhim khu kev qha siab - lub zog ua haujlwm.
Physics ntawm facet instability
Freshly cleaved facets.Lub ntsej muag tshiab tshiab yog tshuaj lom neeg thiab siv hluav taws xob ua haujlwm -dangling bonds qhia nruab nrab- qhov tsis sib xws uas txhawb nqa tsis muaj hluav taws xob rov ua dua, cua sov hauv cheeb tsam, thiab ua rau kom muaj kev puas tsuaj rau daim iav qhov muag puas tsuaj (COMD).
Oxidation thiab paug.Hauv vib nas this hauv huab cua puag ncig, gallium arsenide (GaAs) -raws li facets tsim amorphous gallium thiab arsenic oxides nplua nuj nyob rau hauv lub xeev tsis xws luag. Dej vapor thiab hydrocarbons ntxiv degrade nto zoo, tsim ntxiv tshuaj inhomogeneities thiab txo cov txheej adhesion.
Cov txheej txheem ua tau zoo tab sis luv luv - nyob, yog li cov tuam txhab tso siab rau ob lub tswv yim tseem ceeb los ncua kev degradation ntawm facet degradation: Limiting oxide tsim los ntawm ultrahigh nqus (UHV) cleaving los yog inert tuav, los yog tshem tawm haiv neeg oxide ua ntej siv cov kev kho mob nto ib ntus xws li amorphous hydrogenated (a-Siconiide: H.xlos yog silicon dioxide (SiO2).
Cov kev ntsuas no ncua sijhawm reoxidation tsuas yog luv luv, uas yuav tsum tau hloov pauv sai rau txheej txheej. ZnSe overgrowth muaj kev ruaj ntseg ntev dua tab sis ntawm tus nqi ntawm kev qeeb qeeb, kev nyuaj, thiab kev nqis peev siab.
Manufacturing txwv tsim los ntawm instability
Tight time windows.Lub sijhawm passivation-to-coating yog kho raws li kev sib tw tiv thaiv oxidation: feeb yog qhov zoo tagnrho thiab ntau fabs tsom rau kev hloov ncaj qha los ntawm cleaving rau txheej;<1 hour is manageable with inert-gas handling and minimized exposure; and after >1 teev, oxide kev loj hlob sai thiab hem uniformity, adhesion, thiab tag nrho cov tawm los.
ZnSe txuas ntxiv facet stability nkaus xwb hauv MBE pawg; ib zaug raug rau huab cua, degradation rov pib dua thiab tshem tawm cov kev ruaj ntseg nce sab nraum qhov chaw epitaxial.
Peev thiab kev ua haujlwm hnyav.Txhawm rau nyob hauv lub sijhawm nqaim qhov rai, fabs nqis peev hauv lub tshuab nqus tsev- kev sib xyaw ua ke, kom txo tau cov huab cua raug thiab nruj ob peb cleaving, passivation, thiab txheej txheej; MBE reactors, uas ntxiv cov nqi peev tseem ceeb thiab txwv kev dhau los ntawm cov txheej txheem epitaxial qeeb; thiab "gloveboxes" lossis nitrogen hloov tunnels kom tswj tau qhov chaw tsis muaj zog thaum tuav thiab khaws cia.
Txhua qhov kev daws teeb meem ntxiv tus nqi, qhov nyuaj, lossis kev txwv dhau los ntawm - feem ntau tag nrho peb - thiab muab lub nra ntev rau kev tsim khoom.
Kev txwv hla dhau.Passivation yuav siv sij hawm feeb, tab sis dielectric txheej voj voog mus txog ib teev, uas tsim lub ntuj bottlenecks thaum xav tau siab. ZnSe overgrowth ntawm MBE tseem qeeb dua - kev loj hlob khiav feem ntau yuav tsum tau ob peb teev ib batch, uas ua rau txoj kev sib tw nrog high-volume manufacturing. Thaum lub coater lossis MBE reactor nyob, ntau yuav tsum tau kab thiab lub sij hawm tsis ua haujlwm loj tuaj.
Tus nqi tawm los thiab kev ntseeg siab.Lub sij hawm slips tsim cov oxides tsis tswj, uas ua rau ntau txoj hauv kev tsis ua haujlwm: Cov txheej txheem tsis zoo vim amorphous cov oxides thiab cov kab mob cuam tshuam cuam tshuam nrog nucleation thiab txo lub zog sib cuam tshuam; nonuniform reflectivity, tsav los ntawm spatial variations nyob rau hauv oxide thickness thiab nto chemistry; thiab ua rau muaj kev pheej hmoo ntawm COMD vim tias cov coatings tsis zoo los yog ib nrab absorbed ua rau cov cua sov hauv cheeb tsam thiab kev nqus ntawm lub ntsej muag.
Txawm tias ZnSe tuaj yeem ntxiv cov thermal tsis sib haum xeeb thiab kev ntxhov siab cuam tshuam yog tias cov txheej txheem tsis ua kom zoo dua.
Cov nqi zais ntawm kev tsis ruaj khov
Facet instability los yog tus nqi ntsuas yuav tsum tau tswj nws tsav cov nqi peev (pawg, MBE); tsawg dhau (lub sij hawm lub voj voog tsis sib haum, tsis muaj dab tsi); yield poob (oxidized los yog tsis zoo facets); thiab kev khiav hauj lwm overhead (inert tuav, redundancy).
Tau ntau xyoo lawm, kev lag luam tau ntsib kev sib pauv ntawm kev ceev thiab kev ruaj ntseg: luv luv oxide- tshem tawm thiab ua kom txias cov kauj ruam yog ceev tab sis luv luv, whereas ZnSe overgrowth ruaj khov tab sis qeeb thiab kim. Qhov xav tau yog ib txoj hauv kev uas tuaj yeem hloov tau uas muab cov txiaj ntsig ntawm ob txoj hauv kev- thiab hla lawv.
Crystalline oxide passivation
Ib txoj hauv kev sib txawv.Crystalline oxide passivation reconstructs lub facet rau hauv lub lattice -coherent oxide siv compact UHV ua. Lub resulting txheej yog thermodynamically ruaj khov, thiab zam lub defect-nplua nuj, metastable xeev yam ntxwv ntawm haiv neeg amorphous oxides; tus kheej- txwv qhov tuab, uas ua kom zoo ib yam thiab tiv thaiv kev loj hlob tsis muaj kev tswj hwm; resistant rau oxidation, uas tswj hluav taws xob thiab tshuaj lom neeg ruaj ntseg txawm tias tom qab txuas ntxiv huab cua; thiab nws tau sib xws nrog siab -throughput UHV cov cuab yeej, uas ua rau kev sib koom ua ke rau hauv cov kab ceev, modular laser-bar ua cov kab.
Qhov no tshem tawm cov peev txheej siv zog thiab lub voj voog-lub sij hawm lub nra ntawm MBE thaum muab kev ruaj ntseg mus sij hawm ntev dua li kev kho saum npoo.
Kev ruaj ntseg rau lub lis piam mus rau hli.Cov ntsej muag tsis kho tsis zoo degrade nyob rau hauv feeb thiab txias ib ntus kav sij hawm, tab sis cov crystalline oxide tseem nyob ruaj khov rau lub lis piam mus rau lub hlis. Nws muaj ZnSe- theem kev ruaj ntseg yam tsis muaj epitaxy los pab kom muaj tseeb txheej txheem decoupling hla cleaving, passivation, cia, thiab txheej (saib daim duab . 1).
Txhim kho txheej adhesion thiab COMD kev ua haujlwm.Lub crystalline-oxide nto yog atomically smooth thiab chemically uniformly, uas muab lub hauv paus zoo tshaj plaws rau downstream optical coatings. Qhov no ua rau kev txhim kho dielectric txheej adhesion, enabled los ntawm ib tug huv si, ruaj khov, thiab zoo-order interface; txo qhov tsis xws luag, ua tsaug rau qhov tsis muaj amorphous haiv neeg oxides thiab paug; thiab COMD qhov pib piv rau ZnSe tab sis ua tiav nrog kev ua haujlwm yooj yim dua, scalable.
Kev ua haujlwm yooj yim.Ntev - lub sij hawm ruaj khov kho cov kev tsim ua haujlwm thiab tshem tawm cov kev sib txuas ntawm cov txheej txheem los ua kom muaj kev ywj pheej ntawm kev ua haujlwm tshiab xws li cov txheej txheem decoupling (passivation thiab txheej txheej tuaj yeem ua haujlwm raws li kev ywj pheej takt / lub voj voog sij hawm, tsis yog raug txwv los ntawm oxidation-tsav ceev ceev); cov khoom lag luam buffering (passivated bars tuaj yeem khaws cia, queued, lossis batch- optimized yam tsis muaj degradation); thoob ntiaj teb logistics (cleaving thiab passivation tuaj yeem tshwm sim ntawm ib qho chaw thaum txheej thiab kev sim ua ntawm lwm qhov kom muaj kev sib txawv ntawm qhov chaw tshwj xeeb thiab muab cov saw hlau optimization); thiab optimized batch sizing (coatings npaj rau cov cuab yeej efficiency, tsis ceev).
Platforms xws li Comptek's Kontrox LASE 16 system (saib daim duab . 2) industrialize no workflow los ntawm muab tswj UHV tej yam kev mob engineered rau ntug-emitting laser facets. Nws qhov chaw ua haujlwm ruaj khov thiab nruj tswj hwm cov zaub mov ua kom muaj cov crystalline zoo ib yam - oxide reconstruction ntawm cov nplais ntau lawm.
Qhov cuam tshuam rau siab - ntim khoom
Cov peev txheej qis dua.Lub sij hawm so lub qhov rais tso cai rau cov cuab yeej sib cais, cov cuab yeej hloov pauv hloov ntawm cov kab ke lossis MBE reactors, uas txo cov capex thiab ua kom yooj yim cov kab tsim kom muaj peev xwm hloov tau yooj yim dua, kev ua kom muaj peev xwm yooj yim dua, thiab txo cov nyiaj siv ua haujlwm.
Siab dua.Passivation tsis nyob ntawm kev hloov pauv sai rau lub coater. Bottlenecks txo qis thiab tag nrho cov cuab yeej siv tau zoo dua qub.
Yield thiab kev ntseeg tau nce.Ruaj khov, passivated facets txo qhov sib txawv thiab ntxiv dag zog rau cov txheej txheem kev ntseeg siab thiab COMD kev ua tau zoo, uas txhais ncaj qha rau hauv kev txhim kho cov txiaj ntsig thoob plaws cov khoom ntim siab.
Distributed mov chains.Tsis zoo li ZnSe overgrowth, uas muaj txiaj ntsig zoo kaw cov kab laser rau ib qho MBE-raws li kev tsim kab, kev ruaj ntseg nyob rau lub sij hawm ntev ua rau thaj chaw tiag tiag decoupling. Cleaving thiab passivation yog ua tiav ntawm ib qhov chaw, thaum txheej thiab ntim tau ua tiav ntawm lwm qhov -tsis muaj kev pheej hmoo ntawm degradation thaum khaws lossis thauj. Qhov no qhib kev faib tawm, cov khoom siv hluav taws xob muaj zog, thiab kev ua haujlwm zoo dua.
Yav tom ntej ntawm facet stability
Kev lag luam ntev - sawv cev kev sib pauv ceev ceev-tab sis- lub sijhawm luv luv ntawm qhov chaw txias vs. qeeb-tab sis- ruaj khov ZnSe epitaxy tsis tsim nyog lawm. Crystalline oxide passivation muab txoj hauv kev thib peb: ZnSe- theem kev ruaj ntseg nrog cov txheej txheem yooj yim.
Kev khaws cia lub ntsej muag ncaj ncees rau lub hlis ua rau muaj kev hloov pauv tau yooj yim, ntim ntau, thiab tus nqi tsim hluav taws xob laser, yog li MBE-kev ua tau zoo hauv chav kawm ua tiav ntawm kev tsim khoom.
Facet stability tsis yog ib qho kev suav rov qab, tab sis hloov lub peev xwm uas muab cov khoom lag luam muaj txiaj ntsig zoo tshaj plaws hauv laser ntau lawm: sijhawm.
