EUV lithograph tshuab yog cov khoom tseem ceeb hauv cov khoom tseem ceeb hauv kev tsim, thiab ib qho ntawm lawv cov tub ntxhais subsystems yog laser {{} Plasma (lpp) EUV teeb qhov chaw. Sij hawm dhau los, kev ua lag luam thoob ntiaj teb rau qhov no tso cai rau ntawm Co2 lasers tsim los ntawm Cymer, Asmeskas lub tuam txhab. Cov lasers no》nrog kev txhim kho kev txuag hluav taws xob (CE) tshaj li 5%, thiab ua lub teeb pom kev zoo rau ASML lithograph tshuab. ASML tam sim no tsuas yog cov chaw tsim khoom lag luam live ntawm lub ntiaj teb muaj peev xwm siv EUV teeb cov chaw, tswj hwm 100% kev ua lag luam hauv daim teb no. Txawm li cas los xij, vim kev tswj hwm kev xa tawm los ntawm Asmeskas Chav Lis Haujlwm ntawm Tuam Tshoj, ASML thiab lwm cov tuam txhab nude tau raug txwv tsis pub muaj kev txhim kho ntawm Tuam Tshoj tshaj tawm.
Tab sis cov kws tshawb nrhiav Suav tau raug kaw. Tom qab xyoo ntawm kev ua haujlwm nyuaj, Lin Nan pab pawg pioneered txoj kev tshiab, siv cov khoom siv roj av es tsis txhob siv lub teeb ci CO2. Tam sim no, pab pawg 1μm cov khoom 1μm tau - Lub Xeev Laser tau ua tiav qhov kev ua tau zoo tshaj plaws ntawm 3.42%. Thaum tseem tsis tau tshaj 4%, nws surpasses kev ua haujlwm ntawm kev tshawb fawb pawg hauv Netherlands thiab ib nrab ntawm 5.5% kev ua tau zoo ntawm kev ua lag luam teeb pom kev zoo. Cov kws tshawb nrhiav kwv yees hais tias theoretical qhov siab tshaj plaws hloov dua siab tshiab ntawm lub hauv paus hauv lub hauv paus kev sim ua tau zoo nyob rau yav tom ntej. Cov kev tshawb fawb tshwj xeeb tau nyuam qhuav luam tawm ntawm daim npog ntawm 2025 qhov teeb meem ntawm Tuam Tshoj Laser Magazine, Qhov Teeb Meem 6 (Lub Peb Hlis lig).
Lin Nan, tus sau tus sau ntawm daim ntawv no, muab kev txhawb nqa muaj zog rau qhov kev tshawb fawb no nrog nws cov kev tshawb fawb keeb kwm thiab kev tshaj lij. Nws tseem yog tus kws tshawb fawb thiab tus thawj saib xyuas lub koom haum ntawm RangeSas thiab Technology} Kev Kawm Txuj Ci Micro- Nano pawg neeg ntawm Suav zej zog ntawm kev tsim kho kho qhov muag. Lin Nan yav dhau los ua haujlwm ua ib qho kev tshawb fawb tshawb fawb thiab tom qab ntawd zoo li lub taub hau ntawm lub teeb tshuab hluav taws xob hauv R & D chav haujlwm ntawm ASML hauv Netherlands. Nws muaj dua ib xyoo caum ntawm kev paub, kev tshawb fawb engineering, thiab kev tswj hwm ntawm loj {6} Cov khoom siv sib xyaw ua ke thiab ntsuas cov khoom siv. Nws tau thov rau thiab tau txais tshaj 110 tus neeg thoob ntiaj teb, thiab lwm lub tebchaws, ntau yam uas tau ua rau cov khoom siv litography thiab metrology tshiab. Nws kawm tiav ntawm Lund University nyob rau hauv Sweden, uas nws kawm nyob rau hauv 2023 Nobel nqi zog yeej hauv Physics Anne L'Huillier. Nws kuj tau txais ib qho kev sib koom ua ke los ntawm Paris} Saclay University thiab FRISH lub koomhaum kev koom haum, thiab ua cov postdoctoral kev tshawb fawb ntawm Eth Zurich hauv Switzerland.
Nyob rau hauv lub ob hlis ntuj ntawm xyoo no, Lin Nan pab pawg tau luam tawm cov ntawv sau thib peb ntawm cov ntawv sau ua ke ntawm cov ntawv sau tseg, uas tuaj yeem siv rau kev ntsuas lub siab Cov txheej txheem tau ua tiav kev hloov zuj zus ntawm nce mus txog 52.5%, uas yog qhov siab tshaj plaws tau tshaj tawm kev txhawb nqa kev ua tau zoo rau hnub tim. Piv nrog rau tam sim no kev ua lag luam siab- kev ua kom muaj zog ntawm 6 qhov kev txhawb nqa tshiab rau qib Lithography Qib.
Cov khoom - Lub Xeev Laser {}} Ua kom haum los ntawm Lin Nan cov khoom siv hauv ASML cov khoom siv linograph. Cov ntawv hais, "txawm tias muaj kev sib zog hloov zuj zus ntawm tsuas yog 3%, khoom {}}}}}}} pa raug pov thawj thiab daim npog ntsej muag." Hauv kev sib piv, kev lag luam CA2 lasers, thaum siab}}} pa hluav taws xob (tsawg dua 5%), thiab cov nqi ua haujlwm siab. Cov khoom - lub xeev pulsed lasers, tam sim no mus txog kilowatt-qib kaum thiab yuav tsum tau mus txog ntau dua 10 zaug yav tom ntej.
Txawm hais tias kev tshawb fawb ntawm cov khoom - lub xeev laser {}}}}}}} Cov neeg mob siab thiab kev ntsuas cov peev txheej, thiab Muaj deb - Nrhiav tau qhov tseem ceeb rau Tuam Tshoj txoj kev tshawb fawb ywj pheej thiab kev txhim kho EUH lithaphy thiab nws cov tseem ceeb ntawm cov khoom siv thiab thev naus laus zis.
Thaum lub sijhawm ua lag luam hu nkauj lub hlis no, ASML CFO Roger tau hais tias nws tau lees paub tias Suav tau ua rau EUV teeb tsa. Txawm li cas los xij, nws tseem ntseeg tias nws yuav siv sijhawm ntau xyoo rau Tuam Tshoj los tsim cov khoom ua kom siab dua EUV litionboard. Txawm li cas los xij, kev siv dag zog tsis paub thiab txuas ntxiv mus txuas ntxiv ntawm cov kws tshawb fawb Suav tau maj mam rhuav txoj kev cia siab no. Xyoo 2024, ASML ua tiav cov khoom muag net ntawm € 28.263 lab, ib xyoos-}%, teeb tsa cov ntaub ntawv tshiab. Tuam Tshoj tau pib ua lag luam ntau tshaj plaws, nrog kev muag khoom € 10.195 nphom, suav nyiaj rau 36.1% ntawm nws cov nyiaj thoob ntiaj teb. Txawm nyob rau hauv cov ntsiab lus teb ntawm tam sim no semiconductor export tswj thiab cov nyiaj tau los ntawm kev lag luam me ntsis hauv 2025. Sawv tsees teb chaws ntxaij tsis ruaj khov.
