01 Taw qhia
Hauv kaum xyoo dhau los, kev nce qib tseem ceeb tau ua tiav hauv kev tshawb fawb ntawm ultrafast pulsed lasers, txhim kho lawv cov kev ua haujlwm ruaj khov thiab yoog raws. Txawm hais tias qhov ua tau zoo ntawm ultrafast pulsed lasers tuaj yeem ua tau raws li qhov xav tau ntawm ntau daim ntawv thov, tseem muaj qhov tsis muaj kev ua haujlwm zoo rau cov ntawv thov kev lag luam thaum siv ultrafast pulsed (USP) lasers rau kev ua. Muaj ob txoj hauv kev los txhim kho USP kev ua haujlwm: 1) los ntawm kev ua kom lub zog pulse; 2) los ntawm kev nce cov mem tes rov ua dua. Kev ua tau zoo ntawm cov khoom siv ua haujlwm siv USP lasers yuav tsum sib tw nrog lwm cov thev naus laus zis, yog li cov kws tshawb fawb tau siv zog heev rau kev tswj hwm lub zog laser dhau ntawm lub laser nws tus kheej. Ntau yam tshuab thiab kho qhov muag tshuab tau siv los tswj txoj haujlwm, kev taw qhia, thiab cov duab ntawm lub laser beam ntawm lub workpiece.
02 Vibrating daim iav thiab polygon scanner
Qhov chaw ruaj khov thiab yooj yim tshaj plaws ntawm lub laser beam tiav yog siv lub galvanometer scanner, uas tilts ob daim iav uas yuav luag tsis muaj inertia nyob rau hauv txoj kab ntsug. Niaj hnub nimno galvanometer scanners nrog f-theta lens ntawm 160 mm focal ntev tuaj yeem txav lub laser beam ntawm qhov ceev ntawm 20 m / s hauv 100 mm x 100 mm teb ntawm saib. Nyob rau hauv xws li speeds, synchronizing lub laser mem tes nrog lub suab ntawm lub laser beam yuav nyuaj. Polygon scanners tau siv dav rau kev thaij duab thiab kev nyeem ntawv barcode, thiab lawv tseem tshiab hauv kev ua cov khoom siv. Lawv tuaj yeem txav cov nqaj laser hla ntawm qhov chaw ua haujlwm ntawm qhov nrawm ntawm 100-1000 m / s. Lub synchronization ntawm USP laser pulses nrog qhov ruaj khov kev sib hloov ntawm lub polygon yog qhov nyuaj dua. Los ntawm kev sib txuas cov tshuab luam ntawv polygon nrog ib qho -axis galvanometer scanners, ib qho ceev ob-dimensional scanner tau tsim (Daim duab 1). Kev faib tawm ntawm cov laser pulses tas mus li thoob plaws tag nrho cov chaw ua haujlwm laser decouples thaum tshav kub kub thiab plasma shielding cuam tshuam.
03 Laser beam shaping
Feem ntau cov lasers tawm kab teeb nrog Gaussian beam profile. Qhov kev siv zog yog siab nyob rau hauv nruab nrab ntawm lub nqaj thiab qis dua ntawm cov npoo. Qhov kev faib hluav taws xob spatial no tsis muaj txiaj ntsig zoo rau ntau daim ntawv thov, tshwj xeeb tshaj yog hauv kev ua cov yeeb yaj kiab nyias. Laser beam shaping thiab homogenisation cov tswv yim tuaj yeem txhim kho cov duab zoo rau ntau yam ntawm cov khoom siv laser ua cov ntawv thov. Diffractive optical elements (DOEs) tuaj yeem hloov lub voj voog Gaussian beam rau hauv lub voj voos sab saum toj -kab lub kaus mom, qhov twg ib feem loj ntawm lub nqaj txoj kab uas hla khaws cov kev siv zog, yog li muab cov kab teeb pom kev zoo rau cov txheej txheem, raws li pom hauv daim duab 2.
Ib qho kev xaiv yooj yim rau shaping laser beams yog siv spatial light modulators (SLM) raws li cov khoom siv pixelated nrog cov hluav taws xob hloov hluav taws xob ua kua. Khoos phis tawj- tsim cov holograms raug xa mus rau SLM tswj hluav taws xob los teeb tsa theem lossis lub qhov ncauj qhov ntswg rau lub teeb ci laser. Lub SLM, ua ke nrog femtosecond lasers, tsim ntau cov kab hluav taws xob sib txawv rau kev ua haujlwm sib luag, ua rau muaj kev nce qib siab ntawm -precision microstructuring ntawm silicon thiab titanium alloys ntau tshaj kaum zaug.
Daim duab 2. Kev siv zog faib ntawm lub kaum sab xis saum toj kawg nkaus laser beam tsim siv FBS thiab lub lens kheej kheej (txoj cai), ntsuas siv lub koob yees duab CCD. Lub input beam profile yog qhia nyob rau sab laug. Qhov nruab nrab laser tso zis zog yog 12 W.
04 Multi- kab teeb system
Siv lub zog siab USP lasers nrog lub siab mem tes rov ua dua nyob rau hauv MHz ntau yam yuav ua rau muaj teeb meem hauv cheeb tsam thermal, xws li overheating thiab yaj tsim, uas tuaj yeem txo qhov zoo ntawm ablation. Ua kom tau zoo ablation zoo yuav tsum tau ua tib zoo sib xws ntawm txhua tus txheej txheem tsis, tab sis lub siab beam deflection ceev ntawm advanced galvanometers los yog polygon scanners tsis ib txwm muab meej micro-machining kev daws teeb meem. Nyob rau hauv cov ntaub ntawv no, ntau lub laser beams muab ib tug ntau yam ntawm high-power ablation tov, raws li qhia nyob rau hauv daim duab 3, uas qhia txog qhov tshwm sim ntawm parallel processing siv ib tug grating tsim nrog ib tug Dammann grating los tsim diffraction 1 × 5 thiab 5 × 5 beam arrays.
Daim duab 3. (a) Thaum G1=0 thiab G2=125, ib lub laser profileometer (Spiricon) pom 1 × 5 (sab laug) thiab 5 × 5 (txoj cai) array. (b) Qhov muag qhov muag tau ua tiav ntawm polished Ti64 cov qauv los ntawm kev siv 1 × 5 (sab laug) thiab 5 × 5 (txoj cai) Dammann grating (G1=0, G2=125).
05 Cov ntsiab lus
Ultrashort pulse lasers tsim cov teeb pom kev sib txuas nrog cov mem tes ntev li ntawm picoseconds mus rau femtoseconds, thiab tau dhau los ua neeg nyiam nyob rau hauv precision laser micro-machining. Lawv tau txais txiaj ntsig tsis yog los ntawm kev kwv yees zoo laser ablation uas ua rau cov cua sov- cuam tshuam thaj chaw tab sis kuj los ntawm kev txhim kho kev sib cuam tshuam nrog cov ntaub ntawv, qhib kev ua haujlwm tshiab, tshwj xeeb nrog cov ntaub ntawv pob tshab. Hauv cov ntsiab lus, kev txhim kho ntawm ultrashort mem tes lasers tau zoo txhawb kev ua kom zoo ntawm cov txheej txheem ablation.
